Japanese Government Procurement
National University Corporation - Notice of request for submission of materialsi-line stepper 1 Set
This procurement is covered by the WTO Agreement on Government Procurement, Japan-EU Economic Partnership Agreement or Japan-UK Comprehensive Economic Partnership Agreement.
| Publishing date | Apr 01, 2020 |
|---|---|
| Type of notice | Notice of request for submission of materials |
| Procurement entity | National University Corporation - Miyagi |
| Classification |
0026 Miscellaneous Articles |
| Summay of notice | ⑴ Classification of the products to be procured : 26 ⑵ Nature and quantity of the products to be purchased : i-line stepper 1 Set ⑶ Type of the procurement : Purchase ⑷ Basic requirements of the procurement : A Be able to expose fine patterns on a reticle to a wafer by reduction projection exposure method. B Should have a wafer transfer system. C Should have a wafer pre-alignment system. D Be able to align patterns to be exposed precisely with existing patterns on a wafer. E Be able to focus on a wafer automatically. F Be able to expose patterns on a wafer of various sizes including the range from 20 mm square to 8-inch diameter. A tray provided by the University can be used for the wafer smaller than 4-inch. G Be able to expose patterns on the wafer with large warpage. H Be able to expose patterns on transparent wafers. I Should have a back-side alignment system. J Be able to expose patterns with high-throughput. K Should have a reticle transfer system. L Be able to stock reticles and to set the selected reticle automatically. ⑸ Time limit for the submission of the requested material : 17 : 00 7 May, 2020 ⑹ Contact point for the notice : Shigehiro Akiyama, Procurement Services Office, Finance Department, Tohoku University, 2-1-1 Katahira Aoba-ku Sendai-shi 980-8577 Japan, TEL 022-217-4869 |
